High purity flow path, high reproducibility, stability and response speed

Model number SLA7840

The Brooks SLA7840 device is a high purity metal sealed instrument that controls pressure and measures flow rates simultaneously. Remote pressure sensor signals are supplemented by adjustable integral PID control elements and coplanar control valves to maintain pressure at target values. Compared to other metal-sealed controllers, coplanar valves reduce the impact of pressure changes and reduce leakage rates, making equipment more stable over long periods of service.