Model CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of vacuum-dependent processes: Select Brooks Instruments' XacTorr® series digital vacuum capacitance manometers. The XacTorr® family of devices combines a variety of industry-wide features and technologies to improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects.

The advanced Mark-IV sensor provides surface areas not used for pressure measurement -- for accumulation of particles and compressible vapor. Therefore, it reduces the work of meter reset, prolongs the sensor life and does not bring the risk of sensor drift. In addition, fast response sensors are available to provide high closed loop control performance.

Results: Ultra-accurate, repeatable and accurate vacuum measurement ensures that every time the chamber pressure is vacuumed, the target Torr value required by the process can be accurately reached to achieve clean and pollution-free production.